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Physical layout and functional description

The matching network ensures an effective power transfer and provides for an impedance transformation between the 13.56 MHz RF generator and electrical load by the ion source. Automatic matching network

The π-typematching network consists of two extremely exact motorized capacitors (C1 and C2) with a variable capacity forming together with a coil an oscillatory circuit. Sensing the forward (FWD) and reflected (REF) RF power, C1 and C2 can be tuned by rotation to minimize the reflected power.

 

Replacement circuit diagram of the RF generator, matching network

object

measuring unit

value

type: π-type (capacitor grounded, inductance fixed)

use: adjustment of RF plasma sources with characteristic impedance of 50 Ohms

Physical specifications

dimensions (width x height x depth)

28 units x 3 height units (132,5 mm) x 500 mm (without plug)

mounting

½ 19” slide-in, rack-mounting

weight

kg

2.8

Connector / Cable specifications

input / output jacks

type N (50 Ohm)

ground connection

M5

Input power specifications

line voltage

VAC

100…240

line frequency

Hz

50…60

max. input power (during tuning)

W

30

time-lag fuse at power input

mA

500

RF specifications

frequency of RF generator (operating freq.)

MHz

13.56

maximum RF power input

W

300

analogue voltage signal input for forward power and reflected power

V

0…5 or 0…10

max. capacity of C1 and C2

pF

 

setting of capacitors

stepper motors

operation modes

manually or automatically

Environmental specifications

operating temperature

°C

-25…55

storage temperature

°C

-25…70

relative humidity (non-condensing)

%

5…95

vibration (2g peak)

Hz

10…150


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