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The matching network ensures an effective power transfer and provides for an impedance transformation between the 13.56 MHz RF generator and electrical load by the ion source.

The π-typematching network consists of two capacitors (C1 and C2) with a variable capacity forming together with a coil an oscillatory circuit. C1 and C2 can be tuned by rotation to minimize the reflected power.

 Manuell einstellbares Anpassnetzwerk für HF-Plasmaquellen

use

adjustment of RF plasma sources with characteristic impedance of 50 ohms

matching type

Pi ( capacitor grounded, inductance fixed )

power

max. 300 Watt

operating frequency

13,56 Mhz

operational range

SWR 1:4 ; 12 - 220 Ohm

dielectric strength

max. 1kV ( DC )

Final drive ratio

1:9 (max / min = 4.5 turns, no stop)

display

0 = maximal- 4,5 = minimal capacitance

input / output jacks

type N ( 50 Ohm )

ground connection

M5

dimensions ( B-H-T )

28TE - 3HE - 227mm

weight

2,8 kg

 

 

 


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