top
logo

   

 The unique solution for large scale ion beam processing

Key Design Features

  • Filament-free source operation based on a simple, compact microwave power coupling
  • Permanent magnets for use of the Electron Cyclotron Resonance (ECR)
  • Flange mounting configuration
  • Functional ceramics for easy and quick maintenance
  • Special grid insulation and adjustment system

 

Advantages

  • Fully noble gas, and oxygen; restricted for reactive gases
  • Grid systems from different shape and material for optimum process adaptation
  • Modular concept up to 2 m length
  • Minimum maintenance and long lifetime, maintenance cycles over 300 h
  • Homogeneous beam profile over the total length, 80%

 

Technical Specifications

 

EC/L 800

Type:

Flange mounted microwave excited ion source with multiapertur extraction grids

Discharge modules:

1

Source materials:

Discharge lining: Al2O3

 

Grids: Graphite

 

Vacuum separation of the microwave antenna: SiO2 cup

 

Permanent magnets: NdFeB

 

Housing: Stainless steel

 

Magnetic shield: Ni coated steel

Grid types:

2 grid system

 

2 standard systems (focussing and plane)

Size:

Immerse depth: standard 104.5 mm

 

235 mm x 875 mm (without flange)

Weight:

~80 kg

Flange:

Non-standard rectangular flange with O-ring seal

 

340 mm x 975 mm

Microwave power:

~125 to 400 W at 2.45 GHz for each module

Ion current:

Maximum 1200 mA at 1000 V (1.2 kW)

Ion energy:

~100 to 1000 eV

Accelerator voltage:

0 to –1000 V

Process gases:

Noble gases, N2 (No restrictions)

O2,and Halogen containing gases (Grid lifetime reduced)

Gas flow :

25 … 40 sccm, plug in connector for 6 mm hose

Cooling water:

1.5 l/min, plug in connectors for 6 mm hose

Linear ECR Broad Beam Ion Source


bottom
top
© 2013 IOT GmbH  Impressum   Sitemap

bottom
Real time web analytics, Heat map tracking