top
logo

   

 The standard solution for measuring current density and beam profile

 Internal mounted FC/I 01 Faraday Cup

Key Design Features

  • Functional system for easy and quick installation
  • Compact graphite housing

Advantages

  • Useable for long time measurements with high thermal load of the Faraday cup
  • Quick and easy maintenance of the graphite aperture and long working cycles

Description

 The Faraday cup enables the measuring of the beam profile and the ion current density in substrate position.

Faraday Cup Beam Profile Measurement

Principle

  • Measuring of the ion flux at small graphite probe
  • Probe behind a grounded graphite shield with a small aperture (1 mm in diameter)
  • Measuring of the beam profile by scanning of the ion source or the Faraday cup

Dimensions / Size

 Farady Cup dimensions

 

 


bottom
top
© 2013 IOT GmbH  Impressum   Sitemap

bottom
Real time web analytics, Heat map tracking